JPH0350056U - - Google Patents
Info
- Publication number
- JPH0350056U JPH0350056U JP10815989U JP10815989U JPH0350056U JP H0350056 U JPH0350056 U JP H0350056U JP 10815989 U JP10815989 U JP 10815989U JP 10815989 U JP10815989 U JP 10815989U JP H0350056 U JPH0350056 U JP H0350056U
- Authority
- JP
- Japan
- Prior art keywords
- holes
- slits
- substrate holder
- view
- movable substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 238000009529 body temperature measurement Methods 0.000 claims description 2
- 238000001816 cooling Methods 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
- 239000013307 optical fiber Substances 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10815989U JPH06458Y2 (ja) | 1989-09-14 | 1989-09-14 | 熱プラズマトーチ用測温装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10815989U JPH06458Y2 (ja) | 1989-09-14 | 1989-09-14 | 熱プラズマトーチ用測温装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0350056U true JPH0350056U (en]) | 1991-05-15 |
| JPH06458Y2 JPH06458Y2 (ja) | 1994-01-05 |
Family
ID=31656815
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10815989U Expired - Lifetime JPH06458Y2 (ja) | 1989-09-14 | 1989-09-14 | 熱プラズマトーチ用測温装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06458Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003197535A (ja) * | 2001-12-21 | 2003-07-11 | Sumitomo Mitsubishi Silicon Corp | 気相成長装置および気相成長装置の温度検出方法ならびに温度制御方法 |
-
1989
- 1989-09-14 JP JP10815989U patent/JPH06458Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003197535A (ja) * | 2001-12-21 | 2003-07-11 | Sumitomo Mitsubishi Silicon Corp | 気相成長装置および気相成長装置の温度検出方法ならびに温度制御方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06458Y2 (ja) | 1994-01-05 |
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